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Fuming sulfuric acid, also known as oleum, is a solution of sulfur trioxide in sulfuric acid. It is a highly corrosive, dense, oily liquid used to manufacture a wide variety of chemicals and materials including fertilizers, paints, and detergents. It is also used in combination with fuming nitric acid for failure analysis in decapsulation equipment.
When the concentration of nitric acid is more than 86%, it is referred to as fuming nitric acid. Fuming Nitric Acid is commonly available in 90% and 98% concentrations. Both concentrations are used in the semiconductor industry for failure analysis in decapsulation equipment, sometimes in conjunction with fuming sulfuric acid.